Title: |
Analysis and Evaluation of Methods for Automated Wafer Handling in High Volume Manufacturing |
Author(s): |
C. Fischmann, T. Giesen, F. Böttinger, R. Wertz, A. Ehm, N. Böffert, D. Goh, A. Verl, M. Kunz |
Keywords: |
Mechanical Strength, Material Handling, Transport, Damage |
Topic: |
Wafer-based Silicon Solar Cells and Materials Technology |
Subtopic: | Manufacturing Issues and Processing |
Event: | 26th European Photovoltaic Solar Energy Conference and Exhibition |
Session: | 2CO.16.3 |
Pages: |
1107 - 1110 |
ISBN: | 3-936338-27-2 |
Paper DOI: | 10.4229/26thEUPVSEC2011-2CO.16.3 |
Price: |
0,00 EUR |
Document(s): |
paper |