Title: |
BBr3 Diffusion: Process Optimization for High-Quality Emitters with Industrial Cycle Times |
Author(s): |
E. Lohmüller, M. Glatz, S. Lohmüller, U. Belledin, S. Mack, T. Fellmeth, R.C.G. Naber, A. Wolf |
Keywords: |
Diffusion, Recombination, Boron Emitters, Process Optimisation, BBr3 |
Topic: |
Silicon Materials and Cells |
Subtopic: | Manufacturing & Production of Si Cells |
Event: | 37th European Photovoltaic Solar Energy Conference and Exhibition |
Session: | 2CV.1.43 |
Pages: |
364 - 369 |
ISBN: | 3-936338-73-6 |
Paper DOI: | 10.4229/EUPVSEC20202020-2CV.1.43 |
Price: |
0,00 EUR |
Document(s): |
paper |