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Title:
 
Development of High Efficient p-Type Industrial PERC-Solar Cells
 
Author(s):
 
J. Glatz-Reichenbach, F. Buchholz, P. Díaz-Pérez, P. Preis, J. Theobald, E. Wefringhaus, K. Peter
 
Keywords:
 
Laser Processing, Manufacturing and Processing, Passivation, PECVD, Metallization, Metallisation
 
Topic:
 
WAFER-BASED SILICON SOLAR CELLS AND MATERIALS TECHNOLOGY
Subtopic: Silicon Solar Cell Improvements
Event: 28th European Photovoltaic Solar Energy Conference and Exhibition
Session: 2DV.3.7
 
Pages:
 
1842 - 1845
ISBN: 3-936338-33-7
Paper DOI: 10.4229/28thEUPVSEC2013-2DV.3.7
 
Price:
 
 
0,00 EUR
 
Document(s): paper, poster
 

Abstract/Summary:


This paper presents an industrial applicable, easy and robust PERC process with focus on the improvement of three process steps, the wafer cleaning before passivation, the opening of the rear side passivation layer and the evaluation of different rear side Al-containing contact pastes with respect to the co-firing in order to optimize the entire PERC process sequence. The standard IMEC cleaning routine of the wafer, which is set-in immediately before the rear side passivation, was carefully substituted by HF/O3+HCl/HF-Dips of variable durations and different concentrations to simplify the process. The opening of the thermally grown and PECVD deposited rear side passivation stack was carried out by two techniques, either by chemical etching via screen print technique or alternatively by UV laser ablation. The laser ablation opening in combination with IMEC cleaning, different Al-containing rear side paste printing and adapted co-firing results in cell efficiency up to 19.5 %.