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Key Aspects for Industrial Efficiency above 22% PERC Solar Cells Based on Double-Side AlOx Passivation
Y. Cui, S. Yuan, Y. Hu, W. Zhang, X.W. Zhang, Y. Ren, L. Zhu, Y. Wan, Q. Huang
Passivation, Solar Cell, PERC, High-Efficiency
Silicon Materials and Cells
Subtopic: Manufacturing & Production of Si Cells
Event: 36th European Photovoltaic Solar Energy Conference and Exhibition
Session: 2CV.2.72
399 - 401
ISBN: 3-936338-60-4
Paper DOI: 10.4229/EUPVSEC20192019-2CV.2.72
0,00 EUR
Document(s): paper


This paper gives a close-up insight into the application of alumina (AlOx) films on phosphorus doped (n+) silicon surfaces and device performance. It is shown that AlOx films can effectively passivate n+ surface with a moderate sheet resistance by introduction of thin intermediate thermal oxide layer. High efficiency Cz-PERC solar cells with double-side AlOx films were successfully developed. After optimizing three key aspects of the fabrication process, that is, SiO2 interlayer, emitter depth, and special silver paste with relatively lower peak firing temperature, mass-production efficiency of 22.28% and champion efficiency of 22.67% have been achieved. In addition, a low lightinduced degradation of -0.5% (relative) is got, which probably benefits from the lower firing temperature.