Title: |
LPCVD In-Situ n-Type Doped Polysilicon Process Throughput Optimization and Implementation into an Industrial Solar Cell Process Flow |
Author(s): |
R.C.G. Naber, B.W.H. van de Loo, J.R.M. Luchies |
Keywords: |
Contact, Passivation, n-Type, Silicon (Si) Solar Cells |
Topic: |
Silicon Materials and Cells |
Subtopic: | Homojunction Solar Cells |
Event: | 36th European Photovoltaic Solar Energy Conference and Exhibition |
Session: | 2BO.3.2 |
Pages: |
180 - 183 |
ISBN: | 3-936338-60-4 |
Paper DOI: | 10.4229/EUPVSEC20192019-2BO.3.2 |
Price: |
0,00 EUR |
Document(s): |
paper, presentation |