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Title:
 
Yield Optimization in Photovoltaic Manufacturing
 
Author(s):
 
S. Kincal, V. Svidenko, P. Smith, R. Raman, M. Abraham, C. Eberspacher
 
Keywords:
 
Laser Processing, Manufacturing and Processing, Monitoring, PECVD
 
Topic:
 
Thin Film Solar Cells
Subtopic: Manufacturing Issues and Processing
Event: 25th European Photovoltaic Solar Energy Conference and Exhibition / 5th World Conference on Photovoltaic Energy Conversion, 6-10 September 2010, Valencia, Spain
Session: 3BV.3.50
 
Pages:
 
3679 - 3682
ISBN: 3-936338-26-4
Paper DOI: 10.4229/25thEUPVSEC2010-3BV.3.50
 
Price:
 
 
0,00 EUR
 
Document(s): paper
 

Abstract/Summary:


This work presents the results of implementing the SunFab™ Process and Yield Diagnostic (SPYD™) system, a factory integrated process monitoring and yield optimization solution. The solution leverages, extensive hardware equipment performance knowledge, factory automation software expertise, and an in-depth understanding of process dependencies to enable an excursion free manufacturing environment while identifying avenues of baseline performance improvement. The impact of the SPYD™ solution is quantified by comparing the before and after performance trends of an actual production line, showing a complete elimination of high impact excursions as well as a continued improvement in the excursion free baseline by 5x. Examples from the chemical vapor deposition and laser scribe modules are discussed, and their impacts on yield improvement are quantified. Implementing SPYD™ has a striking impact on improving the line yield of a photovoltaic manufacturing factory. It also sheds light on several opportunities to improve parametric yield and is the platform upon which further new features, such as integrated parametric metrology coupled with more advanced yield algorithms can be deployed to further improve the total output of the factory.