Title: |
Direct Deposition of µc-Si Films with APCVD on Borosilicate Glass |
Author(s): |
T. Rachow, M. Künle, S. Janz, S. Reber |
Keywords: |
Epitaxy, Thin Film (TF), µc-Si, Si-Deposition, Chemical Vapor Deposition |
Topic: |
Thin Film Solar Cells |
Subtopic: | Thin Film Crystalline Silicon Solar Cells |
Event: | 26th European Photovoltaic Solar Energy Conference and Exhibition |
Session: | 3AV.3.7 |
Pages: |
2770 - 2774 |
ISBN: | 3-936338-27-2 |
Paper DOI: | 10.4229/26thEUPVSEC2011-3AV.3.7 |
Price: |
0,00 EUR |
Document(s): |
paper |