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Title:
 
Surface Preparation and Optimization of Amorphous Silicon Deposition for Silicon Heterojunction Solar Cells
 
Author(s):
 
S. Herasimenka, B. Dauksher, C. Tracy, K. Ghosh, V. Sharma, M. Bailly, S. Bowden
 
Keywords:
 
Heterojunction, Lifetime, Passivation, Silicon (Si)
 
Topic:
 
WAFER-BASED SILICON SOLAR CELLS AND MATERIALS TECHNOLOGY
Subtopic: Silicon Solar Cell Improvements
Event: 28th European Photovoltaic Solar Energy Conference and Exhibition
Session: 2DV.3.39
 
Pages:
 
1943 - 1946
ISBN: 3-936338-33-7
Paper DOI: 10.4229/28thEUPVSEC2013-2DV.3.39
 
Price:
 
 
0,00 EUR
 
Document(s): paper
 

Abstract/Summary:


Design of Experiment (DOE) approach was used to optimize the characteristics of intrinsic a-Si and doped a-Si films for silicon heterojunction (SHJ) solar cells where effective lifetime and bulk resistivity were used as optimization parameters for intrinsic and doped a-Si respectively. The performance of the optimized films on alkaline etched wafers required additional optimization of post etch cleans. We have developed a cleaning cycle which allows 725-735 mV local Voc and 81- 83% local pFF on non-metallized SHJ solar cells with no reflectance losses. A batch of 16 wafers demonstrated good across wafer and wafer to wafer passivation uniformity with 2.3 ms mean effective lifetime and 0.6 ms standard deviation.