Title:	Enhanced Light Diffusion Using Shadow Mask Based Surface Texturing Technique
Author(s):	C.-M. Hsu, C.-R. Chang, H.-B. Lin, W.-T. Wu
Keywords:	Light Trapping, Solar Cell, Zinc Oxide
Topic:	Thin Films
Subtopic:	Amorphous and Microcrystalline Silicon
Event:	23rd European Photovoltaic Solar Energy Conference and Exhibition, 1-5 September 2008, Valencia, Spain
Session:	3AV.1.27
Pages:	2275 - 2277
ISBN:	3-936338-24-8
Paper DOI:	10.4229/23rdEUPVSEC2008-3AV.1.27
Price:	0,00 EUR
Document(s):	paper

Abstract/Summary:

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Molybdenum doped zinc oxide (MZO) films have been fabricated on glass for the applications in a- Si/-Si based thin film solar cells. To enhance light trapping efficiency, round MZO surface textures were formed on top of a 100nm MZO film using co-sputter deposition through a micro shadow mask. The surface textures, having physical dimensions of 110 nm in height and 120 nm in diameter, evenly spreaded on the MZO film with a pitch of 300 m. These surface textures effectively caused ~ 4 % of light diffusion. The diffused light is believed to be able to laterally travel in a-Si/-Si thin film absorbers, and its enhancing effect on the solar power efficiency is expected.