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Enhanced Light Diffusion Using Shadow Mask Based Surface Texturing Technique
C.-M. Hsu, C.-R. Chang, H.-B. Lin, W.-T. Wu
Light Trapping, Solar Cell, Zinc Oxide
Thin Films
Subtopic: Amorphous and Microcrystalline Silicon
Event: 23rd European Photovoltaic Solar Energy Conference and Exhibition, 1-5 September 2008, Valencia, Spain
Session: 3AV.1.27
2275 - 2277
ISBN: 3-936338-24-8
Paper DOI: 10.4229/23rdEUPVSEC2008-3AV.1.27
0,00 EUR
Document(s): paper


Molybdenum doped zinc oxide (MZO) films have been fabricated on glass for the applications in a- Si/-Si based thin film solar cells. To enhance light trapping efficiency, round MZO surface textures were formed on top of a 100nm MZO film using co-sputter deposition through a micro shadow mask. The surface textures, having physical dimensions of 110 nm in height and 120 nm in diameter, evenly spreaded on the MZO film with a pitch of 300 m. These surface textures effectively caused ~ 4 % of light diffusion. The diffused light is believed to be able to laterally travel in a-Si/-Si thin film absorbers, and its enhancing effect on the solar power efficiency is expected.