Title:	Fine Line Patterning of SiNx by EDM Wires for c-Si Solar Cell Pre-Metallization Process
Author(s):	P.S. Aakella, S.S. Joshi, C.S. Singh Solanki
Keywords:	Etching, Silicon (Si), Metallization, Metallisation, Antireflective Coating, Nitride
Topic:	WAFER-BASED SILICON SOLAR CELLS AND MATERIALS TECHNOLOGY
Subtopic:	Silicon Solar Cell Improvements
Event:	29th European Photovoltaic Solar Energy Conference and Exhibition
Session:	2CV.4.47
Pages:	1403 - 1405
ISBN:	3-936338-34-5
Paper DOI:	10.4229/EUPVSEC20142014-2CV.4.47
Price:	0,00 EUR
Document(s):	paper, poster

Abstract/Summary:

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Conventional screen printing based crystalline silicon solar cell process dominates the silicon solar cell industry due to its ease adaptability in the production industry. The metallization is the crucial process in the silicon solar cell fabrication because it realizes the contacts and hence the electrical parameters. Screen printing of the desired contact pattern and firing is the well - known and optimized process in the silicon PV industry. High throughput and fast inline process are the major advantages of widely developed present screen printing technology. However the screen printing has its own limitations such as printing finer grid lines, spreading faster over cell etc. Hence it is important to explore the alternate metallization technique to screen printing technology, which should be better than the conventional one. Researchers found that inclusion of the selected pre-metallization process greatly enhances the electrical performance compared to the conventional screen printing technology. One such a pre-metallization process is patterning the dielectric coatings followed by metallization. In this present work, a novel technique based on the foresaid patterning technique, named as electro discharge machines (EDM) wire technique has been applied for making finer grid lines by patterning the anti-reflective coatings with etch paste. The surface and the quasi photoconductive decay studies on these patterned cells were carried out. The results are interpreted and incorporated.