Title: |
Fine Line Patterning of SiNx by EDM Wires for c-Si Solar Cell Pre-Metallization Process |
Author(s): |
P.S. Aakella, S.S. Joshi, C.S. Singh Solanki |
Keywords: |
Etching, Silicon (Si), Metallization, Metallisation, Antireflective Coating, Nitride |
Topic: |
WAFER-BASED SILICON SOLAR CELLS AND MATERIALS TECHNOLOGY |
Subtopic: | Silicon Solar Cell Improvements |
Event: | 29th European Photovoltaic Solar Energy Conference and Exhibition |
Session: | 2CV.4.47 |
Pages: |
1403 - 1405 |
ISBN: | 3-936338-34-5 |
Paper DOI: | 10.4229/EUPVSEC20142014-2CV.4.47 |
Price: |
0,00 EUR |
Document(s): |
paper, poster |