Title: |
Reduced Surface Reflection of Solar Silicon and Solar Glass by Maskless Plasma Texturing with CHF3/H2 |
Author(s): |
A. Okhorzina, N. Bernhard |
Keywords: |
Plasma Texturing, Optical Properties, Silicon, Solar Glass |
Topic: |
Silicon Materials and Cells |
Subtopic: | High Temperature Route for Si Cells |
Event: | 37th European Photovoltaic Solar Energy Conference and Exhibition |
Session: | 2DV.3.38 |
Pages: |
545 - 548 |
ISBN: | 3-936338-73-6 |
Paper DOI: | 10.4229/EUPVSEC20202020-2DV.3.38 |
Price: |
0,00 EUR |
Document(s): |
paper, poster |