Title: |
Novel Approach for Self-Aligned Local Polysilicon Layer Formation |
Author(s): |
Y. Cai, R. Chen, B.J. Hallam, F.E. Rougieux |
Keywords: |
Etching, Laser Processing, a-Si/µ-Si |
Topic: |
Silicon Materials and Cells |
Subtopic: | High Temperature Route for Si Cells |
Event: | 38th European Photovoltaic Solar Energy Conference and Exhibition |
Session: | 2DV.3.12 |
Pages: |
321 - 325 |
ISBN: | 3-936338-78-7 |
Paper DOI: | 10.4229/EUPVSEC20212021-2DV.3.12 |
Price: |
0,00 EUR |
Document(s): |
paper, poster |